High-Performance Nanophononic Resonators in Self-Suspended WSe$_2$ Domes and Drums

Abstract

Van der Waals materials are ideally suited for the implementation of high-frequency nanophononic resonators with atomically flat interfaces. Here, we present two versatile van der Waals-based nanophononic architectures: First, we introduce self-supporting nano-domes of WSe$_2$ as a scalable platform for the simultaneous generation of hundreds of high-quality nanoacoustic resonators with resonance frequencies in the 100 GHz range. Second, we engineer self-supporting nano-drums that reach record-high working frequencies for 2D-semiconductor transducers beyond 1 THz. Through optical pump-probe spectroscopy experiments and photoelastic linear chain model calculations, we gain a detailed understanding of the intricate interplay between phononic mode hybridization across heterostructures, the differences between modes close to the center and edge of the acoustic Brillouin zone, and the temporal structure of the photoelastic response. Both architectures have potential applications in low-cost nanoacoustic probing and the ultrafast modulation of quantum emitters in two-dimensional semiconductors. While nano-drums surpass the THz frequency barrier, nano-domes appear as an accessible, low-cost alternative for developing scalable nanophononic technologies.