Role of the Casimir force in the capacitive radio-frequency microelectromechanical switches

Abstract

We determine the role of the fluctuation-induced Casimir force acting between a membrane of cylindrical shape and a bottom electrode in microelectromechanical capacitive switches. For this purpose, the Casimir force is computed taking into account the real properties of both a membrane and a bottom electrode materials with account of surface roughness. The obtained results are compared with those found for the smooth surfaces using the idealization of ideal metal. It is shown that an account of both the real material properties and surface roughness is crucial for obtaining the correct values of the Casimir force. According to our results, at the shortest separations, when the switch membrane is in contact with the transmission line, the magnitudes of the Casimir force may exceed the magnitudes of the electric one depending on the value of the operating voltage. The obtained values of the Casimir force can be used for determining the thickness of the switch membrane, which ensures the necessary magnitude of the restoring elastic force required for a stable cyclic functioning of the micromechanical switch with no pull-in.