Enhanced hydrogen response of copper-doped TiO2 synthesised by helium-assisted magnetron sputtering
Abstract
Cu-doped TiO2 thin films for hydrogen sensing were synthesised by reactive DC magnetron sputtering in Ar/O2/He mixtures, with the He fraction used as a control parameter for film growth. By combining normal-angle deposition (NAD) and glancing-angle deposition (GLAD) with post-deposition annealing, the effects of He on microstructure formation and sensor performance were examined. X-ray diffraction and electron microscopy revealed that He promotes nanostructuring, lattice expansion in as-deposited NAD films, increased porosity after annealing, and a stronger anatase character in the final oxide layers. These structural changes, which enhance the reactive surface area, lead to improved hydrogen sensing at 300\, in 1~vol.\,\% H2. The response of NAD films increased from 1.4 to 6.0 simply by replacing part of the argon with helium, whereas GLAD films showed only a modest increase. The observed nanostructuring is discussed in terms of a simulation-supported growth scenario involving energetic backscattered He, a reduced hammering effect, and cooling-related suppression of adatom mobility, which together favour the formation of a more open sensing layer. Helium-assisted sputtering represents a useful physical route for tailoring oxide thin films for gas-sensing applications.
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