Evidence of potential sputtering of ultra-thin Pt films due to impact of multi-charged Ar ions
D. Ghose, P. Karmakar
Abstract
The phenomenon of potential sputtering of ultra-thin Pt films due to impact of 20 keV highly charged Arq+ (q = 3 - 8) ions has been investigated. The results show enhanced erosion of the Pt film with the increase of potential energy of the Ar projectile.
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