A user-friendly approach to local anodic oxidation

Abstract

A home made DSP-controlled scanning probe microscope (SPM) system has been developed and its utilization as a tool for lithography on nanometer scale is reported. User-friendly graphic interface allows to directly perform nanolithography importing a bitmap pattern on previously-imaged sample region, otherwise moving in real time the probe using an ordinary mouse, acting as a pantograph from macroscopic down to nanometer scale, taking advantage from an absolute-positioning stage. Any measured property of the sample can be used by the lithographic interface to realize interactive patterning of the sample. Moreover, the 'contour-mode' permits to move tip at a fixed relative tip-sample distance, exploiting at each step the previously-acquired topographic signal. The instrument has been successfully employed in order to perform local anodic oxidation (LAO) lithography on semiconducting substrates.