A near-field scanned microwave probe for spatially localized electrical metrology
Vladimir V. Talanov, Andre Scherz, Robert L. Moreland, Andrew R. Schwartz
Abstract
We have developed a near-field scanned microwave probe with a sampling volume of approximately 10 micron in diameter, which is the smallest one achieved in near-field microwave microscopy. This volume is defined to confine close to 100 percent of the probe net sampling reactive energy, thus making the response virtually independent on the sample properties outside of this region. The probe is formed by a 4 GHz balanced stripline resonator with a few-micron tip size. It provides non-contact, non-invasive measurement and is uniquely suited for spatially localized electrical metrology applications, e.g. on semiconductor production wafers.
Create a lesson
Related papers
Temperature dependence of the charge density from first principles: application to the (222) forbidden reflection in silicon
Jean Paul Nery, Raveena Gupta, Olle Hellman et al.
Coupled anisotropic weak topological states and Floquet mixed-parity altermagnetism in two-dimensional Su-Schrieffer-Heeger models
Kunyuan Feng, Xibin Liu, Chenchen Liu et al.
Grain Boundary Phase Transitions Enable Diffusionless Climb of Disconnections
Md Sharier Nazim, Giacomo Po, Nikhil Chandra Admal
3D Cloud Component Analysis of Atomic Structures
Pai Li
Benchmarking of Fast and Interpretable UF Machine Learning Potentials
Pawan Prakash, Sam Dong, Richard G. Hennig
Grain-Boundary Premelting in High-Entropy Transition Metal Carbides
Marium M. Mou, Caleb Schenck, Samuel E. Daigle et al.