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Negative oxygen vacancies in HfO2 as charge traps in high-k stacks

J. L. Gavartin, D. Munoz Ramo, A. L. Shluger, G. Bersuker, B. H. Lee

cond-mat.mtrl-sciarXiv:cond-mat/0605593

Abstract

We calculated the optical excitation and thermal ionization energies of oxygen vacancies in m-HfO2 using atomic basis sets, a non-local density functional and periodic supercell. The thermal ionization energies of negatively charged V- and V2- centres are consistent with values obtained by the electrical measurements. The results suggest that negative oxygen vacancies are the likely candidates for intrinsic electron traps in the hafnum-based gate stack devices.

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