Phase Analysis of Thin Film Oxide Systems by AES and EELS
V. G. Beshenkov, V. A. Marchenko, V. T. Volkov, A. G. Znamenskii
Abstract
Auger electron spectroscopy (AES) and electron energy loss spectroscopy (EELS) in a reflection mode are compared as the methods for phase composition investigation of thin film oxide systems by ion profiling. As an example, the Al/Al2O3/Si and YBa2Cu3O7/CeO2/Al2O3 systems are considered. The adaptation of applied statistics methods for AES and EELS data treatment is discussed.
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