Imaging of Microwave Permittivity, Tunability, and Damage Recovery in (Ba,Sr)TiO3 Thin Films
D. E. Steinhauer, C. P. Vlahacos, C. Canedy, A. Stanishevsky, J. Melngailis, R. Ramesh, F. C. Wellstood, Steven M. Anlage
Abstract
We describe the use of a near-field scanning microwave microscope to quantitatively image the dielectric permittivity and tunability of thin-film dielectric samples on a length scale of 1 micron. We demonstrate this technique with permittivity images and local hysteresis loops of a 370 nm thick barium strontium titanate thin film at 7.2 GHz. We also observe the role of annealing in the recovery of dielectric tunability in a damaged region of the thin film. We can measure changes in relative permittivity as small as 2 at 500, and changes in dielectric tunability as small as 0.03 V-1.
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