Efficient readout of micromechanical resonator arrays in ambient conditions

Abstract

We present a method for efficient spectral readout of mechanical resonator arrays in dissipative environments. Magnetomotive drive and detection is used to drive double clamped resonators in the nonlinear regime. Resonators with almost identical resonance frequencies can be tracked individually by sweeping the drive power. Measurements are performed at room temperature and atmospheric pressure. These conditions enable application in high throughput resonant sensor arrays.