Self-aligned multi-channel superconducting nanowire avalanche photodetector

Abstract

We describe a micromachining process to allow the coupling of an array of single-mode telecommunication fibers to individual superconducting nanowire single photon detectors (SNSPDs). As proof of principle, we show the integration of four detectors on the same silicon chip, including two standard single-section nanowire detectors and two superconducting nanowire avalanche photodetectors (SNAPs) with modified series structure without external inductor, and their performances are compared. The SNAP shows saturated system detection efficiency of 16% while the dark count rate is less than 20 Hz, without the use of photon-recycling reflectors. The SNAP also demonstrates doubled signal-to-noise ratio, reduced reset time (~ 4.9 ns decay time) and improved timing jitter (62 ps FWHM) compared to standard SNSPDs.