Spherical aberration correction in a scanning transmission electron microscope using a sculpted foil

Abstract

Nearly twenty years ago, following a sixty year struggle, scientists succeeded in correcting the bane of electron lenses, spherical aberration, using electromagnetic aberration correction. However, such correctors necessitate re-engineering of the electron column, additional space, a power supply, water cooling, and other requirements. Here, we show how modern nanofabrication techniques can be used to surpass the resolution of an uncorrected scanning transmission electron microscope more simply by sculpting a foil of material into a refractive corrector that negates spherical aberration. This corrector can be fabricated at low cost using a simple process and installed on existing electron microscopes without changing their hardware, thereby providing an immediate upgrade to spatial resolution. Using our corrector, we reveal features of Si and Cu samples that cannot be resolved in the uncorrected microscope.