Lateral position correction in ptychography with sub-pixel accuracy

Abstract

Ptychography, a form of Coherent Diffractive Imaging, is used with short wavelengths (e.g. X-rays, electron beams) to achieve high-resolution image reconstructions. One of the limiting factors for the reconstruction quality is the accurate knowledge of the illumination probe positions. Recently, many advances have been made to relax the requirement for the probe positions accuracy. Here, we analyze and demonstrate a straightforward approach that can be used to correct the probe positions with sub-pixel accuracy. Simulations and experimental results with visible light are presented in this work.

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