Open-source automated chemical vapor deposition system for the production of two - dimensional nanomaterials

Abstract

The study of two- dimensional (2D) materials is a rapidly growing area within nanomaterial research. However, the high equipment costs, which include the processing systems necessary for creating these materials, can be a barrier to entry for some researchers interested in studying these novel materials. Such process systems include those used for chemical vapor deposition. This article presents the first open-source design for an automated chemical vapor deposition system that can be built for less than a third of the cost for a similar commercial system. Our design can be easily customized and expanded on, depending upon the needs of the user. With a process chamber built as described, we demonstrate that a variety of 2D nanomaterials and their heterostructures can be grown via chemical vapor deposition. Specifically, our experimental results demonstrate the capability of this open-source design in producing high quality, 2D nanomaterials such as graphene and tungsten disulfide, which are at the forefront of research in emerging semiconductor devices, sensors, and energy storage applications.