Detection of hidden gratings through multilayer nanostructures using light and sound

Abstract

We report on the detection of diffraction gratings buried below a stack of tens of 18 nm thick $\mathrm{SiO_2}$ and $\mathrm{Si_3N_4}$ layers and an optically opaque metal layer, using laser-induced, extremely-high frequency ultrasound. In our experiments, the shape and amplitude of a buried metal grating is encoded on the spatial phase of the reflected acoustic wave. This grating-shaped acoustic echo from the buried grating is detected by diffraction of a delayed probe pulse. The shape and strength of the time-dependent diffraction signal can be accurately predicted using a 2D numerical model. Surprisingly, our numerical calculations show that the diffracted signal strength is not strongly influenced by the number of dielectric layers through which the acoustic wave has to propagate. Replacing the $\mathrm{SiO_2}$/$\mathrm{Si_3N_4}$ layer stack with a single layer having an equivalent time-averaged sound velocity and average density, has only a small effect on the shape and amplitude of the diffracted signal as a function of time. Our results show that laser-induced ultrasound is a promising technique for sub-surface nano-metrology applications.