A nanoelectromechanical position-sensitive detector with picometer resolution

Abstract

Sub-nanometer displacement detection lays the solid foundation for critical applications in modern metrology. In-plane displacement sensing, however, is mainly dominated by the detection of differential photocurrent signals from photodiodes, with resolution in the nanometer range. Here, we present an integrated in-plane displacement sensor based on a nanoelectromechanical trampoline resonator. With a position resolution of 4 $pm/Hz^{1/2}$ for a low laser power of 85 $\mu$W and a repeatability of 2 nm after 5 cycles of operation as well as good long-term stability, this new detection principle provides a reliable alternative for overcoming the current position detection limit in a wide variety of research and application fields.