Micromechanical bolometers for sub-Terahertz detection at room temperature

Abstract

Fast, room temperature imaging at THz and sub-THz frequencies is an interesting feature which could unleash the full potential of plenty applications in security, healthcare and industrial production. In this Letter we introduce micromechanical bolometers based on silicon nitride trampoline membranes as broad-range detectors, down to the sub-THz frequencies. They show, at the largest wavelengths, room-temperature noise-equivalent-powers comparable to state-of-the-art commercial devices (~100 pW Hz-1/2); adding the good operation speed and the easy, large-scale fabrication process, the trampoline membrane could be the next candidate for cheap, room temperature THz imaging and related applications.