Fast determination of thickness through scanning moir\'e fringe in scanning transmission electron microscopy

Abstract

Sample thickness is an important parameter in transmission electron microscopy (TEM) imaging, for interpreting image contrast and understanding the relationship between properties and microstructure. In this study, we introduce a method for determining thickness in scanning transmission electron microscopy (STEM) mode based on scanning moir\'e fringe (SMF). Sample thickness can be determined in situ in the medium magnification using focal-series SMF imaging, with beam damage and contamination avoided to a large extent. This method provides a fast and convenient way for determining thickness in TEM imaging, which is particularly useful for beam-sensitive materials such as Metal-Organic Frameworks.