Three Dimensional Imaging using Coherent X-Rays at Grazing Incidence Geometry

Abstract

We have developed a 3 dimensional Coherent Diffraction Imaging (CDI) algorithm to retrieve phases of diffraction patterns of samples in Grazing Incidence Small Angle X-ray Scattering (GISAXS) experiments. The algorithm interprets the diffraction patterns using the Distorted-Wave Born Approximation (DWBA) instead of the Born Approximation (BA), as in this case the existence of a reflected beam from the substrate causes the diffraction pattern to deviate significantly from the simple Fourier transform of the object. Detailed computer simulations show that the algorithm works. Verification with real experiments is planned.