High-speed and wide-field nanoscale table-top ptychographic EUV imaging and beam characterization with a sCMOS detector

Abstract

We present high-speed and wide-field EUV ptychography at 13.5 nm wavelength using a table-top high-order harmonic source. By employing a scientific complementary metal oxide semiconductor (sCMOS) detector the scan time for sub-20 nm high-resolution measurements were significantly reduced by up to a factor of five. The fast frame rate of sCMOS enables wide-field imaging with a field of view of 100 {\mu}m x 100 {\mu}m with an imaging speed of 4.6 Mpix/h. Furthermore, fast EUV wavefront characterization is employed using a combination of the sCMOS detector with orthogonal probe relaxation.