A real-time hole depth diagnostic based on coherent imaging with plasma amendment during femtosecondlaser hole-drilling

Abstract

An in-process coherent imaging diagnostic has been developed to real-time measure the hole depth during air-film hole drilling by a femtosecond laser. A super-luminescent diode with a wavelength of 830~13 nm is chosen as the coherent light source which determines a depth resolution of 12 {\mu}m. The drilled hole is coupled as a part of the sample arm and the depth variation can be extracted from the length variation of the optical path. Interference is realized in the detection part and a code has been written to discriminate the interference fringes. Density of plasma in the hole is diagnosed to evaluate its amendment to the optical path length and the depth measurement error induced by plasma is non-ignorable when drilling deep holes.