Photodetector Focal Plane Arrays Integrated with Silicon Micropyramidal Structures in MWIR
Abstract
Light-concentrating truncated Si micropyramidal arrays with 54.7 degree sidewall angles were successfully integrated with PtSi Schottky barrier photodetectors. Four different devices consisting of 10 x 10 photodetectors with 60 um pitch combined in parallel were tested, where significant enhancement capability was demonstrated by the Si micropyramids. The device consisting of one hundred 22 um square detectors monolithically integrated with the light-concentrating micropyramidal array displayed signal enhancement of up to 4 times compared to the same size 22 um square photodetector device without the light concentrators.
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