Accurate, precise pressure sensing with tethered optomechanics

Abstract

We show that optomechanical pressure sensors with characterized density and thickness can achieve uncertainty as low as 1.1 % via comparison with a secondary pressure standard. The agreement between the secondary standard and our optomechanical sensors is a necessary step towards using optomechanical devices as primary pressure sensors. Our silicon nitride and silicon carbide sensors are short-term and long-term stable, displaying Allan deviations compatible with better than 1 % precision and baseline drift significantly lower than the secondary standard. Our measurements also yield the in situ thin-film density of our sensors with 1 % total uncertainty or lower, aiding development of other optomechanical sensors. Our results demonstrate that optomechanical pressure sensors can achieve accuracy, precision, and drift sufficient to replace high performance legacy pressure gauges.