Lossless photon flux sensing methodology for EUV and Soft X-ray metrology systems

Abstract

We demonstrate a simple, lossless method for monitoring photon flux in short-wavelength metrology systems, with a particular focus on applications using high harmonic generation (HHG) light sources. In HHG-based metrology, where photon scarcity often limits precision and efficiency, the ability to monitor flux without sacrificing photons is critical. This demonstrated approach measures a photon-induced current in a metallic EUV filter, generated by primary and secondary electrons released via the photoelectric effect during exposure to high-energy photons. By integrating this current over a set exposure period, we obtain a build-up charge directly correlated with the incident photon flux. This measurement provides a reliable, real-time indicator of photon flux, allowing for precise normalization in metrology experiments without introducing additional optical losses. The method leverages any conductive component that are typically present in extreme ultraviolet (EUV) metrology setups, making it a cost-effective and straightforward addition to existing systems.