Fabrication and Characterization of X-ray TES Detectors Based on Annular AlMn Alloy Films

Abstract

AlMn alloy flms are widely fabricated into superconducting transition edge sensors (TESs) for the detection of cosmic microwave background radiation. However, the application in X-ray or gamma-ray detection based on AlMn TES is rarely reported. In this study, X-ray TES detectors based on unique annular AlMn flms are devel-oped. The fabrication processes of TES detectors are introduced in detail. The char-acteristics of three TES samples are evaluated in a dilution refrigerator. The results demonstrate that the I-V characteristics of the three annular TES detectors are highly consistent. The TES detector with the smallest absorber achieved the best energy resolution of 11.0 eV @ 5.9 keV, which is inferior to the theoretical value. The dis-crepancy is mainly attributed to the larger readout electronics noise than expected.