Investigation of the in-pixel response of the Mupix11 monolithic pixel sensor using a microfocus X-ray beam at Diamond Light Source

Abstract

MuPix11 is a High-Voltage Monolithic Active Pixel Sensor (HV-MAPS) developed for the tracking system of the Mu3e experiment. The in-pixel photon response of a MuPix11 sensor thinned to 70 {\mu}m was measured using an 8 keV X-ray beam with a 3 {\mu}m spot size at the B16 beamline at Diamond Light Source, emulating the passage of a minimum ionising particle (MIP). At nominal operating voltage and threshold, high-resolution scans across the pixel matrix show the detector response to be uniform. In the absence of reverse bias (0 V), the relative sub-pixel response is location-dependent as a reduced detection rate is observed at pixel boundaries.