Direct X-ray Imaging of $\mu$m precision using Back-Illuminated CCD

Abstract

A charge-coupled device (CCD) is a standard imager in optical region in which the image quality is limited by its pixel size. CCDs also function in X-ray region but with substantial differences in performance. An optical photon generates only one electron while an X-ray photon generates many electrons at a time. We developed a method to precisely determine the X-ray point of interaction with subpixel resolution. In particular, we found that a back-illuminated CCD efficiently functions as a fine imager. We present here the validity of our method through an actual imaging experiment.