Monolithic integration of optically anisotropic GeSe-based films on GaAs by templated solid-phase epitaxy

Abstract

Layered IV-VI semiconductors such as GeSe exhibit strong in-plane optical anisotropy, making them promising candidates for polarization-sensitive photonic devices. However, realizing these properties in scalable platforms requires heteroepitaxial integration on technologically relevant substrates like GaAs. Direct growth of GeSe is complicated by its glass formation at low temperatures and high vapor pressure at elevated temperatures. To overcome this, we develop a method for ex-situ solid-phase epitaxy utilizing a SnSe buffer and offcut GaAs substrate to enable single-orientation crystalline GeSe films. Using polarized reflection measurements, we find that stabilizing a single-in-plane-orientation results in a 2x increase in anisotropic response between the armchair and zigzag directions. This work provides a new integration route to harness the anisotropic optical properties of GeSe and its alloys for polarization-sensitive technologies.