Freeform super-oscillatory optics for CMOS-integrated THz super-resolution imaging

Abstract

The diffraction limit fundamentally constrains the spatial resolution of far-field imaging systems. While near-field techniques can circumvent this limit, their inherently short working distances (WD) severely restrict practical applications. Super-oscillatory lenses (SOLs) offer a far-field alternative; however, conventional SOLs are plagued by discrete operating wavelengths, low efficiencies (below 5%), and formidable trade-offs among numerical aperture, chromatic aberration, and depth of focus (DOF). Here, we introduce a nonlocal, nonlinear-curvature mechanism to design a freeform SOL that achieves ultrabroadband (0.3 to 1 THz), achromatic super-resolution focusing with an unprecedented efficiency of 44%. Operating at a 9 mm WD, the lens maintains a consistent sub-diffraction full-width at half-maximum (FWHM) of around 0.45 wavelength alongside an extended DOF of around 10 wavelengths. By integrating a compact 65-nm CMOS oscillator-radiator array, we establish an advanced imaging platform capable of resolving complex 2D and 3D sub-millimeter features (down to 0.15 mm). Readily scalable to the optical regime via two-photon lithography, this freeform SOL paradigm paves the way for next-generation, high-performance integrated photonics.