Enhanced Third-Harmonic Generation in a Bound State in the Continuum Assisted Multiband All-Dielectric Metasurface

Abstract

Multiband Fano resonances are demonstrated in the near-infrared (near-IR) using an all-dielectric metasurface whose unit cell consists of four silicon nanoblocks on a glass substrate. An in-plane asymmetry triggers symmetry-protected quasi-bound states in the continuum (QBICs), producing multiple high-Q resonances. Their origin is identified through multipolar decomposition of the scattering cross section and field distributions at the resonances. The strong field localization at these resonances enables efficient multiband third-harmonic (TH) generation in the ultraviolet (UV), with a maximum simulated conversion efficiency of $8.5 \times 10^{-3}$ at a peak pump intensity of $1.6\,\mathrm{GW/cm^{2}}$. The metasurface is fabricated in symmetric and asymmetric configurations, and its linear and nonlinear responses are measured under normal incidence. A TH conversion efficiency of $1.2 \times 10^{-6}$ is obtained at a peak pump intensity of $3.25\,\mathrm{GW/cm^{2}}$. These results establish a route to multiband photonic devices, including multiwavelength lasers, multiband harmonic generation, and single-photon sources for quantum photonics.