Multiscale Correlation of Morphological, Chemical, and Optical Properties in p-Type Porous Silicon

Abstract

We report a systematic study of the correlations among electrochemical processing conditions and the morphological, chemical, and optical properties of porous silicon (pSi). Twenty pSi samples were fabricated from boron-doped (100) crystalline silicon by varying current density, etching time, and hydrofluoric-acid concentration. Scanning electron microscopy, Fourier-transform infrared spectroscopy, and photoluminescence were used to characterize the resulting structures. The two-dimensional porosity varied only moderately, whereas porous-layer thickness increased with etching time and current density. The silicon oxide to silicon hydride ratio showed comparatively small variations. Corrected photoluminescence spectra were fitted with a four-component quantum-wire/quantum-dot model including localized surface-state transitions. The extracted quantum-wire and quantum-dot dimensions decreased systematically with increasing current density, while the photoluminescence maximum under 375 nm excitation showed no clear monotonic dependence on processing conditions. The results demonstrate that no single descriptor adequately captures the multiscale behavior of porous silicon.