Bilayer Lithium Niobate Acoustic Resonators for Spurious-Free Wideband Operation at 6 GHz

Abstract

The evolution of wireless communication standards toward higher frequencies and wider bandwidths places increasing demands on acoustic filter technologies. Conventional resonators face scaling limitations above 5 GHz, where lithographic constraints, reduced electromechanical coupling coefficient (k2eff), and spurious mode excitation hinder practical filter implementation. Here, we introduce a bilayer X-cut lithium niobate (LiNbO3) thickness-shear bulk acoustic resonator architecture that leverages symmetry engineering as a new design degree of freedom. By vertically stacking two piezoelectric thin films with a tailored bonding angle, the second-order thickness-shear mode (SH2, slow) is selectively excited. Furthermore, the fast thickness-shear modes inherent to X-cut LiNbO3 are suppressed, yielding a spurious-free in-band response. Devices operating around 6 GHz demonstrate a k2eff of approximately 35%, in close agreement with finite-element simulations and confirming the symmetry-driven mode selection mechanism. Proof-of-concept ladder filters demonstrate a fractional bandwidth of 18.6%, highlighting the wideband capabilities of the proposed architecture. The proposed configuration enables thickness-defined frequency scaling while maintaining high coupling and spectral purity, offering a promising platform for wideband radiofrequency filters in next-generation wireless systems.