On-Chip Shaping of Surface Acoustic Waves via Continuous Diffractive Modulation

Abstract

Precise shaping of surface acoustic waves (SAWs) on anisotropic piezoelectric substrates is complicated by elastic anisotropy and electromechanical coupling. Here we introduce a continuous diffractive acoustic lens (CDAL), in which weak phase-velocity perturbations produced by subwavelength metallization, together with diffraction, drive lateral field redistribution. An anisotropic thin-element propagation model enables efficient inverse design of the CDAL contour. Laser Doppler vibrometry verifies prescribed lateral field profiles and multichannel beam splitting with unequal widths. By combining continuous diffractive modulation with discrete source-phase encoding, we further shape the lateral field into a Bessel profile, demonstrating joint amplitude-and-phase control. This work provides a high-precision and fabrication-compatible mechanism for on-chip SAW field modulation.