Study of Multilayer TiNx/Ti/TiNx Films Formed In Situ for High-Efficiency Integrated Microheaters
Oleg A. Solovyev, Zakhar S. Enbaev, Alexander R. Shevchenko, Aleksander M. Mumlyakov, Pavel A. Berezhnoy, Mikael O. Geodakyan, Mikhail V. Tsvetkov, Michael A. Tarkhov, Igor V. Trofimov
Abstract
A technology for the in situ formation of a three-layer TiNx/Ti/TiNx functional material within a single vacuum cycle is presented, together with the results of investigations of its structural and electrophysical properties. The maximum critical power density reached approximately 140 MW/cm2. Under continuous operation at 90% of the critical power, the structures remained operational for 24 h. The characteristics of microbridges without and with a protective SiOx layer were compared. The presence of the coating modifies the electrothermal operating regime of the structures and enables estimated temperatures of approximately 500-700 degrees Celsius to be reached.
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