Electrically Tunable Collective Modes in a MEMS Resonator Array

Abstract

Using optical diffraction, we study the mechanical vibrations of an array of micromechanical resonators. Implementing tunable electrostatic coupling between the suspended, doubly-clamped Au beams leads to the formation of a band of collective vibrational modes within these devices. The evolution of these modes with coupling strength is clearly manifested in the optical diffraction pattern of light transmitted through the array. The experimental results are analyzed using a simple model for one-dimensional phonons. These structures offer unique prospects for spectral analysis of complex mechanical stimuli.