A Percolative Model of Soft Breakdown in Ultrathin Oxides
C. Pennetta, L. Reggiani, Gy. Trefan
Abstract
The degradation of ultrathin oxide layers in the presence of a stress voltage is modeled in terms of two antagonist percolation processes taking place in a random resistor network. The resistance and leakage current fluctuations are studied by MonteCarlo simulations for voltages below the breakdown threshold. An increase of excess noise together with a noticeable non-Gaussian behavior is found in the pre-breakdown regime in agreement with experimental results.
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