Observed Effects of a Changing Step-Edge Density on Thin-Film Growth Dynamics

Abstract

We grew SrTiO3 on SrTiO3 [001] by pulsed laser deposition, while observing x-ray diffraction at the (0 0 .5) position. The drop dI in the x-ray intensity following a laser pulse contains information about plume-surface interactions. Kinematic theory predicts dI/I = -4sigma(1-sigma), so that dI/I depends only on the amount of deposited material sigma. In contrast, we observed experimentally that |dI/I| < 4sigma(1-sigma), and that dI/I depends on the phase of x-ray growth oscillations. The combined results suggest a fast smoothing mechanism that depends on surface step-edge density.