Composition, structure, and luminescent properties of SiOxNy(Si) composite layers containing Si nanocrystals
V. G. Baru, I. N. Dyuzhikov, V. I. Pokalyakin, O. F. Shevchenko, E. A. Skryleva, O. M. Zhigalina
Abstract
A relationship between the chemical composition, structure and luminescent properties of light-emitting SiOxNy(Si) composite layers with Si nanocrystals is demonstrated. Photoluminescence (PL) with a maximum of intensity at 500-600 nm is observed in a narrow region of chemical compositions with relatively small Si excess (about 10 at. %). Composite layers structure is studied by means of HRTEM. Appearance of nanocrystals due to annealing is accompanied by substantial growth (30-40 times) of PL intensity but do not change PL spectra shape. Chemical composition of structural luminescent-active complexes with excess Si atomes is determined by XPS technique.
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