Hot Electron Bolometer Development for a Submillimeter Heterodyne Array Camera

Abstract

We are developing Nb diffusion-cooled Hot Electron Bolometers (HEBs) for a large-format array submillimeter camera. We have fabricated Nb HEBs using a new angle deposition process. We have characterized these devices using heterodyne mixing at 20 GHz. We also report on optimizations in the fabrication process that improve device performance.

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