Amorphous thin film growth: theory compared with experiment
M. Raible, S. G. Mayr, S. J. Linz, M. Moske, P. Hänggi, K. Samwer
Abstract
Experimental results on amorphous ZrAlCu thin film growth and the dynamics of the surface morphology as predicted from a minimal nonlinear stochastic deposition equation are analysed and compared. Key points of this study are (i) an estimation procedure for coefficients entering into the growth equation and (ii) a detailed analysis and interpretation of the time evolution of the correlation length and the surface roughness. The results corroborate the usefulness of the deposition equation as a tool for studying amorphous growth processes.
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