Interactions of Ar(9+) and metastable Ar(8+) with a Si(100) surface at velocities near the image acceleration limit

Abstract

Auger LMM spectra and preliminary model simulations of Ar(9+) and metastable Ar(8+) ions interacting with a clean monocrystalline n-doped Si(100) surface are presented. By varying the experimental parameters, several yet undiscovered spectroscopic features have been observed providing valuable hints for the development of an adequate interaction model. On our apparatus the ion beam energy can be lowered to almost mere image charge attraction. High data acquisition rates could still be maintained yielding an unprecedented statistical quality of the Auger spectra.