May 2008 arXiv papers — page 41

S. Rafiei, S. Jalalzadeh, K. Ghafoori Tabrizi

We present a method to calculate the One-loop mass correction to Kinks mass in a (1+1)-dimensional field theoretical model in which the fluctuation potential $V^{\prime\prime}(ϕ_c)$ has shape invariance property. We use the generalized zeta function regularization method to implement our setup for describing quantum kink states.

Sophie Grape

Two measurements of the energy resolution were performed at MAX-Lab in Lund, Sweden, with an array of 3$\times$3 PbWO4 crystals using a tagged photon beam with energies between 19 and 56 MeV. The crystals were cooled down to -15 and -25 degrees C. The measured relative energy resolution, sigma/E, is decreasing from approximately 12% at 20 MeV to 7% at 55 MeV

I. V. Davydov, A. I. Podlivaev, L. A. Openov

Two-dimensional complexes of C_20 fullerenes connected to each other by covalent bonds have been studied. Several isomers with different types of intercluster bonds have been revealed. The lifetimes of the (C_20)_MxM systems with M = 2 and 3 have been directly calculated at T = 1800 - 3300 K making use of molecular dynamics. It has been shown that these comp

A. G. Khachatryan, F. A. van Goor, K. -J. Boller

Coherent and incoherent electromagnetic radiation emitted from a laser wakefield accelerator is calculated based on Lienard-Wiechert potentials. It is found that at wavelengths longer than the bunch length, the radiation is coherent. The coherent radiation, which typically lies in the infrared range, shows features that reveal details of the acceleration pro

G. Van Hooydonk

We give supporting evidence for and elaborate further on the fact -see Kreidi et al., Phys. Rev. Lett. 100, 133005 (2008)- that ionic states are essential for covalent dihydrogen H2.

Tobias M. Schneider, Bruno Eckhardt

Several experimental and numerical studies have shown that turbulent motions in circular pipe flow near transitional Reynolds numbers may not persist forever, but may decay. We study the properties of these decaying states within direct numerical simulations for Reynolds numbers up to 2200 and in pipes with lengths equal to 5, 9 and 15 times the diameter. We

Giorgio De Pasquale, Aurelio Somà, Alberto Ballestra

The effect of mechanical fatigue on structural performances of gold devices is investigated. The pull-in voltage of special testing micro-systems is monitored during the cyclical load application. The mechanical collapse is identified as a dramatic loss of mechanical strength of the specimen. The fatigue limit is estimated through the stair-case method by me

K. I. Sinclair, T. Tilford, M. Y. P. Desmulliez, G. Goussetis

A novel open waveguide cavity resonator is presented for the combined variable frequency microwave curing of bumps, underfills and encapsulants, as well as the alignment of devices for fast flip-chip assembly, direct chip attach (DCA) or wafer-scale level packaging (WSLP). This technology achieves radio frequency (RF) curing of adhesives used in microelectro

C. Seguineau, M. Ignat, C. Malhaire, S. Brida

This study is focused on the mechanical characterization of materials used in microelectronic and micro- electromechanical systems (MEMS) devices. In order to determine their mechanical parameters, a new deformation bench test with suitable micromachined specimens have been developed. Uniaxial tensile tests were performed on "low cost" specimens, con

Andras Vass-Varnai, M. Rencz

The rapid incursion of new technologies such as MEMS and smart sensor device manufacturing requires new tailor-made packaging designs. In many applications these devices are exposed to humid environments. Since the penetration of moisture into the package may result in internal corrosion or shift of the operating parameters, the reliability testing of hermet

Tenghsien Lai, Changhan Huang, Chingfu Tsou

The past few years have seen an increasing focus on energy harvesting issue, including power supply for portable electric devices. Utilize scavenging ambient energy from the environment could eliminate the need for batteries and increase portable device lifetimes indefinitely. In addition, through MEMS technology fabricated micro-generator could easy integra

Robert Hahn, Stefan Wagner, Steffen Krumbholz, Herbert Reichl

A PEM micro fuel cell system is described which is based on self-breathing PEM micro fuel cells in the power range between 1 mW and 1W. Hydrogen is supplied with on-demand hydrogen production with help of a galvanic cell, that produces hydrogen when Zn reacts with water. The system can be used as a battery replacement for low power applications and has the p

Patrick Sangouard, G. Lissorgues, T. Bourouina

This work relates to a novel piezoelectric transformer to be used in an autonomous sensor unit, possibly in conjunction with a RF-MEMS retro-modulator.

E. Schwyter, W. Glatz, L. Durrer, Ch. Hierold

We present and discuss the fabrication process and the performance of a flexible micro thermoelectric generator with electroplated Bi2Te3 thermocouples in a SU-8 mold. Demonstrator devices generate 278uWcm-2 at dTmeas=40K across the experimental set up. Based on model calculations, a temperature difference of dTG=21.4K across the generator is assumed. Due to

Filippo Visco Comandini, Mazyar Mirrahimi, Michel Sorine

The study of the scattering data for a star-shape network of LC-transmission lines is transformed into the scattering analysis of a Schrödinger operator on the same graph. The boundary conditions coming from the Kirchhoff rules ensure the existence of a unique self-adjoint extension of the mentioned Schrödinger operator. While the graph consists of a number

C. -Y. Lee, Zgen-Hui Chen, Hsien-Tseng Chang, Chiang-Ho Cheng

The present study presents a new micro electromagnetic actuator utilizing a PDMS membrane with a magnet. The actuator is integrated with micro coils to electromagnetically actuate the membrane and results in a large deflection. The micro electromagnetic actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical c

Renaud Robin, Salim Touati, Karim Segueni, Olivier Millet

This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structure enables four states which allowed large deflections (4$μ$m) with low actuation voltage (7,5V). This design presents also a good contact force and improve the restoring force of t

Jian Lu, T. Ikehara, Yi Zhang, Takashi Mihara

A high quality factor (Q-factor) piezoelectric lead zirconat titanate (PZT) actuated single crystal silicon cantilever was proposed in this paper for resonant based ultra-sensitive mass detection. Energy dissipation from intrinsic mechanical loss of the PZT film was successfully compressed by separating the PZT actuator from resonant structure. Excellent Q-f

Salim Touati, Nicolas Lorphelin, Alexandre Kanciurzewski, Renaud Robin

This paper concerns a new design of RF MEMS switch combined with an innovative process which enable low actuation voltage (<5V) and avoid stiction. First, the structure described with principal design issues, the corresponding anti-stiction system is presented and FEM simulations are done. Then, a short description of the process flow based on two non polyme

Mustafa Calis, Omar Laghrouche, Marc Desmulliez

Modelling MEMS involves a variety of software tools that deal with the analysis of complex geometrical structures and the assessment of various interactions among different energy domains and components. Moreover, the MEMS market is growing very fast, but surprisingly, there is a paucity of modelling and simulation methodology for precise performance verific

Anis Nordin, Ioana Voiculescu, Mona Zaghloul

Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of temperature is required. This work presents the design, modeling and characterization of integrated dual-serpentine polysilicon resistors as a method for temperature control of CMOS SAW resonators

M. Calis, Marc Desmulliez

This paper presents an implementation of the Cosserat theory into haptic sensing technologies for real-time simulation of microstructures. Cosserat theory is chosen instead of the classical theory of elasticity for a better representation of stress, especially in the nonlinear regime. The use of Cosserat theory leads to a reduction of the complexity of the m

A. Bret, L. Gremillet, D. Benisti, E. Lefebvre

Besides being one of the most fundamental basic issues of plasma physics, the stability analysis of an electron beam-plasma system is of critical relevance in many areas of physics. Surprisingly, decades of extensive investigation had not yet resulted in a realistic unified picture of the multidimensional unstable spectrum within a fully relativistic and kin

Mrigank Sharma, Akila Kannan, Edmond Cretu

This paper presents a detailed noise analysis and a noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena at micro scale. The existing literature presents detailed models for the damping at microscale, but usually neglects the

Udo Triltsch, Stephanus Büttgenbach

In this paper we present the latest version of the TCAD environment BICEP&#39;S (Braunschweigs Integrated CAD-Environment for Product Planning and Process Simulation). By using a central process database, which allows the exchange of all relevant process data it is able to overcome many of the mentioned obstacles. The database and process planning tool can b

El Mehdi Boujamaa, Yannick Soulie, Frédérick Mailly, Laurent Latorre

This paper deals with the design of MEMS using piezoresistivity as transduction principle. It is demonstrated that when the sensor topology doesn&#39;t allow a perfect matching of strain gauges, the resolution is limited by the ability of the conditioning circuit (typically a Wheatstone bridge) to reject power supply noise. As this ability is strongly reduce

Ganesh Bagler

Air transportation has been becoming a major part of transportation infrastructure worldwide. Hence the study of the Airports Networks, the backbone of air transportation, is becoming increasingly important. In complex systems domain, airport networks are modeled as graphs (networks) comprising of airports (vertices or nodes) that are linked by flight connec

Magnus Rimskog, Tomas Bauer

The Through Silicon Via (TSV) process developed by Silex provides down to 30 micrometers pitch for through wafer connections in up to 600 micrometers thick substrates. Integrated with MEMS designs it enables significantly reduced die size and true &#34;Wafer Level Packaging&#34; - features that are particularly important in consumer market applications. The

Zhen Hua Ni, Hao Min Wang, Yun Ma, Johnson Kasim

Graphene has many unique properties which make it an attractive material for fundamental study as well as for potential applications. In this paper, we report the first experimental study of process-induced defects and stress in graphene using Raman spectroscopy and imaging. While defects lead to the observation of defect-related Raman bands, stress causes s

Pascal Nouet, Frédérick Mailly, Laurent Latorre, Pascal Nouet

This paper presents the study of an original closed-loop conditioning approach for fully-integrated convective inertial sensors. The method is applied to an accelerometer manufactured on a standard CMOS technology using an auto-aligned bulk etching step. Using the thermal behavior of the sensor as a summing function, a first order sigma-delta modulator is bu

M. Puech, Jean-Marc Thevenoud, J. M. Gruffat, N. Launay

Emerging 3D chips stacking and MEMS/Sensors packaging technologies are using DRIE (Deep Reactive Ion Etching) to etch through-silicon via (TSV) for advanced interconnections. The interconnection step can be done prior to or post CMOS manufacturing, each requiring different etch process performances. A review of the DRIE capability in terms of etching profile

E. Jung, Andreas Ostmann, Peter Ramm, Jürgen Wolf

This special session on 3D TSV&#39;s will highlight some of the fabrication processes and used technologies to create vias from the frontside of an active circuit to its backside and potential implementation solutions to form complex systems leveraging these novel possibilities. General techniques for via formation are discussed as well as advanced integrati

Jürgen Wolf, P. Ramm, Armin Klumpp, H. Reichl

3D-Integration is a promising technology towards higher interconnect densities and shorter wiring lengths between multiple chip stacks, thus achieving a very high performance level combined with low power consumption. This technology also offers the possibility to build up systems with high complexity just by combining devices of different technologies. For

Rozalia Beica, Charles Sharbono, Tom Ritzdorf

Two dimensional (2D) integration has been the traditional approach for IC integration. Due to increasing demands for providing electronic devices with superior performance and functionality in more efficient and compact packages, has driven the semiconductor industry to develop more advanced packaging technologies. Three-dimensional (3D) approaches address b

Ching-Liang Dai, Jin-Yu Hong, Mao-Chen Liu

This study investigates a high Q-factor spiral inductor fabricated by the CMOS (complementary metal oxide semiconductor) process and a post-process. The spiral inductor is manufactured on silicon substrate using the 0.35 micrometers CMOS process. In order to reduce the substrate loss and enhance the Q-factor of the inductor, silicon substrate under the induc

Chi-Jia Tong, Ming-Tzer Lin

A new technique was developed for studying the mechanical behavior of nano-scale thin metal films on substrate is presented. The test structure was designed on a novel &#34;paddle&#34; cantilever beam specimens with dimensions as few hundred nanometers to less than 10 nanometers. This beam is in triangle shape in order to provide uniform plane strain distrib

Y. -H. Wang, Tzu-Han Hsueh, Rong-Hua Ma, Chia-Yen Lee

The purpose of this paper is to apply characteristics of residual stress that causes cantilever beams to bend for manufacturing a micro-structured gas flow sensor. This study uses a silicon wafer deposited silicon nitride layers, reassembled the gas flow sensor with four cantilever beams that perpendicular to each other and manufactured piezoresistive struct

Haifa El-Sadi, N. Esmail

For a set of operating conditions and coating color formulations, undesirable phenomena like color spitting and coating ribs may be triggered in the Micro-nip during the coating process. Therefore, our interest in this work focus on another parameter affect on the undesirable phenomena as the vortices in the Micro-nip. The problem deals with the flow through

Huang C. H. Huang C. H., Chingfu Tsou, Tenghsien Lai

MEMS technology has been developed rapidly in the last few years. More and more special micro structures were discussed in several publications. However, all of the structures were produced by consist of the three fundamental structures, which included bridge, cantilever and membrane structures. Even the more complex structures were no exception. The cantile

Mazyar Mirrahimi

A Lyapunov-based approach for the trajectory generation of an $N$-dimensional Schr{ö}dinger equation in whole $\RR^N$ is proposed. For the case of a quantum particle in an $N$-dimensional decaying potential the convergence is precisely analyzed. The free system admitting a mixed spectrum, the dispersion through the absolutely continuous part is the main obst

Michael Hilker, Christoph Schommer

The Attacks done by Viruses, Worms, Hackers, etc. are a Network Security-Problem in many Organisations. Current Intrusion Detection Systems have significant Disadvantages, e.g. the need of plenty of Computational Power or the Local Installation. Therefore, we introduce a novel Framework for Network Security which is called SANA. SANA contains an artificial I

Y. Ju, M. Hamada, T. Kobayashi, H. Soyama

In order to develop a new structure microwave probe, the fabrication of AFM probe on the GaAs wafer was studied. A waveguide was introduced by evaporating Au film on the top and bottom surfaces of the GaAs AFM probe. A tip having 8 micrometers high, and curvature radius about 50 nm was formed. The dimensions of the cantilever are 250x30x15 micrometers. The o

P. W. Gian, Xuechuan Shan, Y. N. Liang, B. K. Lok

This paper reports on formation of high aspect micro patterns on low temperature co-fired ceramic (LTCC) substrates by integrating micro inkjetting with electroless plating. Micro inkjetting was realized by using an inkjetting printer that ejects ink droplets from a printhead. This printhead consists of a glass nozzle with a diameter of 50 micrometers and a

Doekle Yntema, Joost Van Honschoten, Remco Wiegerink

A new symmetrical four-wire sensor configuration has resulted in a fully integrated sound intensity sensor with significant lower noise floor and smaller size than its predecessors. An integrated sound pressure sensor was further miniaturized by using a folded &#34;back chamber&#34; at both sides of the chip.

Sven Reitz, Andreas Schroth, Peter Schneider

The goal is the development of a novel principle for the temperature acquisition of refrigerants in CO2 air conditioning systems. The new approach is based on measuring the temperature inside a pressure sensor, which is also needed in the system. On the basis of simulative investigations of different mounting conditions functional relations between measured

N. Crespy, J. Courteaud, P. Combette, P. Temple Boyer

This paper presents a numerical simulation and experimental results of a one-dimensional thermal inclinometer with the cavity filled of gas and liquid. The sensor principle consists of one heating resistor placed between two detectors. When the resistor is electrically powered, it creates a symmetrical temperature profile inside a micromachined silicon cavit

Jhy-Cherng Tsai, Ming-Fong Chen, Hsiharng Yang

Micro lens array is crucial in various kinds of optical and electronic applications. A micro lens array with high numerical aperture (NA) and low aberration is in particular needed. This research is aimed to design and fabricate such a micro lens array with simple structure while keeps the same NA of a same-diameter hemisphere lens. A bi-convex semispherical

Masayoshi Watanabe

We prove that an approximated version of the Brunn--Minkowski inequality with volume distortion coefficient implies a Gaussian concentration-of-measure phenomenon. Our main theorem is applicable to discrete spaces.

R. Voicu, R. Muller, L. Eftime

Thermal micro-actuators are a promising solution to the need for large-displacement, gentle handling force, low-power MEMS actuators. Potential applications of these devices are micro-relays, assembling and miniature medical instrumentation. In this paper the development of thermal microactuators based on SU-8 polymer is described. The paper presents the dev

T. -H. Lin, H. Yang, C. -K. Chao

A simple and effective method to fabricate a high fill-factor triangular microlens array using the proximity printing in lithography process is reported. The technology utilizes the UV proximity printing by controlling a printing gap between the mask and substrate. The designed approximate triangle microlens array pattern can be fabricated the high fill-fact

P. Martins, C. Malhaire, S. Brida, D. Barbier

In this paper, the bulge test is used to determine the mechanical properties of very thin dielectric membranes. Commonly, this experimental method permits to determine the residual stress (s0) and biaxial Young&#39;s modulus (E/(1-u)). Associating square and rectangular membranes with different length to width ratios, the Poisson&#39;s ratio (u) can also be

R. F. Shyu, H. Yang, J. -H. Lee

This paper describes the development of metallic bipolar plate fabrication using micro-electroforming process for mini-DMFC (direct methanol fuel cell) stacks. Ultraviolet (UV) lithography was used to define micro-fluidic channels using a photomask and exposure process. Micro-fluidic channels mold with 300 micrometers thick and 500 micrometers wide were firs

Chun-Ping Jen

The technique of laser-assisted nanoimprinting lithography (LAN) has been proposed to utilize an excimer laser to irradiate through a quartz mold and melts a thin polymer film on the substrate for micro- to nano-scaled fabrications. In the present study, the novel concept of that copper was adopted as the substrate instead of silicon, which is conventionally

Eugenio Brusa, Antonio Della-Gaspera, Mircea Gh. Munteanu

Microcantilever specimens for in-plane and out-ofplane bending tests are here analyzed. Experimental validation of 2D and 3D numerical models is performed. Main features of in-plane and out-of-plane layouts are then discussed. Effectiveness of plane models to predict pull-in in presence of geometric nonlinearity due to a large tip displacement and initial cu

Alberto Ballestra, Eugenio Brusa, Giorgio De Pasquale, Mircea Gh. Munteanu

In this paper an experimental validation of numerical approaches aimed to predict the coupled behaviour of microbeams for out-of-plane bending tests is performed. This work completes a previous investigation concerning in plane microbeams bending. Often out-of-plane microcantilevers and clamped-clamped microbeams suffer the presence of residual strain and st

A. Missoffe, J. Juillard, Denis Aubry

This paper presents a reduced-order model for the Reynolds equation for deformable structure and large displacements. It is based on the model established in [11] which is piece-wise linearized using two different methods. The advantages and drawbacks of each method are pointed out. The pull-in time of a microswitch is determined and compared to experimental

T. Veijola, Giorgio De Pasquale, Aurelio Somà

Measured damping coefficients of six different perforated micromechanical test structures are compared with damping coefficients given by published compact models. The motion of the perforated plates is almost translational, the surface shape is rectangular, and the perforation is uniform validating the assumptions made for compact models. In the structures,

P. Bruschi, M. Dei, M. Piotto

The fabrication and experimental characterization of a thermal flow meter, capable of detecting and measuring two independent gas flows with a single chip, is described. The device is based on a 4 x 4 mm2 silicon chip, where a series of differential micro-anemometers have been integrated together with standard electronic components by means of postprocessing

M. Dijkstra, T. S. J. Lammerink, Meint De Boer, J. W. Berenschot

A thermal flow sensor has been realised consisting of freely-suspended silicon-rich silicon-nitride microchannels with an integrated Al/poly-Si++ thermopile in combination with up- and downstream Al heater resistors. The inherently zero offset of the thermopile is exploited in a feedback loop controlling the dissipated power in the heater resistors, eliminat

F. Maury, A. Pothier, A. Crunteanu, F. Conseil

In RF (Radio Frequency) domain, one of the limitations of using MEMS (Micro Electromechanical Systems) switching devices for medium power applications is RF power. Failure phenomena appear even for 500 mW. A design of MEMS switched capacitors with an enhanced topology is presented in this paper to prevent it. This kind of device and its promising performance

B. Charlot, W. Sun, K. Yamashita, H. Fujita

We present a nanomechanical device design to be used in a non-volatile mechanical memory point. The structure is composed of a suspended slender nanowire (width : 100nm, thickness 430nm length : 8 to 30$μ$m) clamped at its both ends. Electrodes are placed on each sides of the nanowire and are used to actuate the structure (writing, erasing) and to measure th

M. Shamshirsaz, M. Maroufi, M. B. Asgari

The analytical models that predict thermal and mechanical responses of microactuator have been developed. These models are based on electro thermal and thermo mechanical analysis of the microbeam. Also, Finite Element Analysis (FEA) is used to evaluate microactuator tip deflection. Analytical and Finite Element results are compared with experimental results

Sum Huan Ng, Zhenfeng Wang

We report on the hot roller embossing of polymer sheets for the creation of microfluidic structures. Measurements conducted on 100 $μ$m features showed that the lateral dimensions could be replicated to within 2% tolerance, while over 85% of mould depth was embossed. Feature sizes down to 50 $μ$m and feature depths up to 30 $μ$m had been achieved. At lower t

Ivan del Tenno

In this article we investigate the asymptotic behavior of a new class of multi-dimensional diffusions in random environment. We introduce cut times in the spirit of the work done by Bolthausen, Sznitman and Zeitouni, see [4], in the discrete setting providing a decoupling effect in the process. This allows us to take advantage of an ergodic structure to deri

A. G. G. Toh, Z. F. Wang, S. H. Ng

The integration of a PDMS membrane within orthogonally placed PMMA microfluidic channels enables the pneumatic actuation of valves within bonded PMMA-PDMS-PMMA multilayer devices. Here, surface functionalization of PMMA substrates via acid catalyzed hydrolysis and air plasma corona treatment were investigated as possible techniques to permanently bond PMMA m

Ciprian Iliescu, Elena Barbarini, Marioara Avram, G. Xu

This paper presents a microfluidic device for magnetophoretic separation red blood cells from blood under contionous flow. The separation method consist of continous flow of a blood sample (diluted in PBS) through a microfluidic channel which presents on the bottom &#34;dots&#34; of feromagnetic layer. By appling a magnetic field perpendicular on the flowing

H. Yang, T. -H. Tsai, C. -C. Hu

This paper is to describe a design and fabrication method for a valve-less peristaltic micro-pump. The valve-less peristaltic micro-pump with three membrane chambers in a serial is actuated by three piezoelectric (PZT) actuators. With the fluidic flow design, liquid in the flow channel is pumped to a constant flow speed ranged from 0.4 to 0.48 mm/s. In term

K. Y. Tung, J. T. Yang

A novel design for vortex modulation of a passive chaotic micromixer, named a circulation-disturbance micromixer (CDM), has been achieved and analyzed experimentally and numerically. The systematic numerical analyses - topological flow characteristics and particle tracking method - have been developed, that enable visualization of detailed mixing patterns. T

Chun-Ping Jen, Yao-Hung Huang, Teng-Wen Chen

The ability to manipulate or separate a biological small particle, such as a living cell and embryo, is fundamental needed to many biological and medical applications. The insulator-based dielectrophoresis (iDEP) trapping is composed of conductless tetragon structures in micro-chip. In this study, a lower conductive material of photoresist was adopted as a s

Wei-Feng Fang, J. T. Yang

A novel micro device with a mechanism of split and recombination (SNR) for rapid fluidic mixing and reaction, named a SNR micro-reactor, was designed, fabricated and systematically analyzed. This SNR micro-reactor possessing an in-plane dividing structure requires only simple fabrication. We investigated this reactor and compared it numerically and experimen

Cheng-Chih Hsueh, Gou-Jen Wang, Shan-Hui Hsu, Huey-Shan Hung

PLGA (poly(lactic-co-glycolic acid)) is one of the most used biodegradable and biocompatible materials. Nanostructured PLGA even has great application potentials in tissue engineering. In this research, a fabrication technique for nanostructured PLGA membrane was investigated and developed. In this novel fabrication approach, an anodic aluminum oxide (AAO) f

A. M. Rucklidge, M. Silber

The Faraday wave experiment is a classic example of a system driven by parametric forcing, and it produces a wide range of complex patterns, including superlattice patterns and quasipatterns. Nonlinear three-wave interactions between driven and weakly damped modes play a key role in determining which patterns are favoured. We use this idea to design single a

Dimitri Galayko, Philippe Basset, Ayyaz Mahmood Paracha

Electrostatic transducers for vibration energy scavenging have been an object to numerous studies, but are still facing major issues relating to their conditioning circuit. One of the most popular ones uses a charge pump and a flyback circuit based on a Buck DC-DC converter (Fig. 1). A commutation between the energy accumulation in the charge pump and the re

Lars Geir Whist Tvedt, Lars-Cyril Julin Blystad, Einar Halvorsen

An electrostatic in-plane overlap varying energy harvester is modeled and simulated using a circuit simulator. Both linear and nonlinear models are investigated. The nonlinear model includes mechanical stoppers at the displacement extremes. Large amplitude excitation signals, both narrow and wide band, are used to emulate environmental vibrations. Nonlinear

L. Carlioz, J. Delamare, S. Basrour, G. Poulin

Autonomous microsystems are confronted today to a major challenge : the one of energy supply. Energy scavenging, i.e. collecting energy from the ambient environment has been developed to answer this problematic. Various sources have already been successfully used (solar, vibration). This article presents temporal variations of temperature as a new source of

Hela Boussetta, S. Basrour, M. Marzencki

In this study, we developed a top/down methodology for behavioral and structural modeling of multi-domain microsystems. Then, we validated this methodology through a study case : a piezoelectric microgenerator. We also proved the effectiveness of VHDL-AMS language not only for modeling in behavioral and structural levels but also in writing physical models t

Y. C. Liu, X. -C. Shan

Micro-indentation test with a micro flat-end cone indenter was employed to simulate micro embossing process and investigate the thermo-mechanical response of ceramic green substrates. The laminated low temperature co-fired ceramic green tapes were used as the testing material ; the correlations of indentation depth versus applied force and applied stress at

X. Shan, Y. C. Soh, C. W. P. Shi, C. K. Tay

In this paper, we will report our achievements in developing large area patterning of multilayered ceramic green composites using roller embossing. The aim of our research is to pattern large area ceramic green composites using a modified roller laminating apparatus, which is compatible with screen printing machines, for integration of embossing and screen p

Jean-Philippe Aguilar, Nils Berglund

We consider a quantum two-level system perturbed by classical noise. The noise is implemented as a stationary diffusion process in the off-diagonal matrix elements of the Hamiltonian, representing a transverse magnetic field. We determine the invariant measure of the system and prove its uniqueness. In the case of Ornstein-Uhlenbeck noise, we determine the s

R. F. Shyu, Litsai Weng, Chi-Ting Ho

In this paper, a practical micromachining technology was applied for the fabrication of a micro probe using a complex nontraditional machining process. A series process was combined to machine tungsten carbide rods from original dimension. The original dimension of tungsten carbide rods was 3mm ; the rods were ground to a fixed-dimension of 50 micrometers us

D. Allen, H. J. Almond, K. Bedner, M. Cabezza

The objective of this research was to study the influence of electroplating parameters on electrodeposit characteristics for the production of nickel (Ni) and nickel-iron (Ni-Fe) microparts by photoelectroforming. The research focused on the most relevant parameter for industry, which is the current density, because it determines the process time and the con

Z. Szucs, G. Bognar, Vladimir Szekely, M. Rencz

In this paper the methodology and the results of a contactless thermal characterization of a high temperature test chamber will be introduced. The test chamber is used for fatigue testing of different MEMS devices where the homogenous temperature distribution within the close proximity from the heating filaments is very important. Our aim was to characterize

Kai Axel Hals, Einar Halvorsen, Xuyuan Chen

Properties of typical MEMS materials have been widely investigated. Mechanical properties of MEMS structures depend not only on the bulk material properties, but also structural factors. A measurement system has been made to measure force/deflection on microstructures to examine some of the structural properties. This is a stylus setup integrated with a load

P. G. Szabo, Vladimir Szekely

Thermal functional circuits are an interesting and perspectivic group of the MEMS elements. A practical realization is called Quadratic Transfer Characteristic (QTC) element which driving principle is the Seebeck-effect. In this paper we present the analyses of a QTC element from different perspectives. To check the real behavior of the device, we measured a

X. -C. Shan, S. H. Ling, H. P. Maw, C. W. Lu

Multilayered ceramic substrates with embedded micro patterns are becoming increasingly important, for example, in harsh environment electronics and microfluidic devices. Fabrication of these embedded micro patterns, such as micro channels, cavities and vias, is a challenge. This study focuses on the process of patterning micro features on ceramic green subst

Jack Hoyd-Gigg Ng, Marc Desmulliez, Aongus Mccarthy, Himanshu Suyal

Conductive micro-patterned copper tracks were fabricated by UV direct-writing of a nanoparticle silver seed layer followed by selective electroless copper deposition. Silver ions were first incorporated into a hydrolyzed polyimide surface layer by wet chemical treatment. A photoreactive polymer coating, methoxy poly(ethylene glycol) (MPEG) was coated on top

Jens Georg Kaufmann, Marc Desmulliez, D. Price

A novel way of filling high aspect ratio vertical interconnection (microvias) with an aspect ratio of >2:1 is presented. High frequency acoustic streaming at megasonic frequencies enables the decrease of the Nernst-diffusion layer down to the sub-micron range, allowing thereby conformal electrodeposition in deep grooves. Higher throughput and better control

D. Flynn, Marc Desmulliez

Potential core materials to supersede ferrite in the 0.5-10 MHz frequency range are investigated. The performance of electrodeposited nickel-iron, cobalt-iron-copper alloys and the commercial alloy Vitrovac 6025 have been assessed through their inclusion within a custom-made solenoid microinductor. Although the present inductor, at 500 KHz, achieves 77% powe

R. R. Mansour, S. Fouladi, M. Bakeri-Kassem

A maskless post-processing technique for CMOS chips is developed that enables the fabrication of RF MEMS parallel-plate capacitors with a high quality factor and a very compact size. Simulations and measured results are presented for several MEMS/CMOS capacitors. A 2-pole coupled line tunable bandpass filter with a center frequency of 9.5 GHz is designed, fa

L. Juhasz, A. Vass-Varnai, Veronika Timar-Horvath, Marc Desmulliez

The aim of a joint research and development project at the BME and HWU is to produce a cheap, reliable, low-power and CMOS-MEMS process compatible capacitive type relative humidity (RH) sensor that can be incorporated into a state-of-the-art, wireless sensor network. In this paper we discuss the preparation of our new capacitive structure based on post-CMOS

Zhen-Zhun Shu, Ming-Li Ke, Guan-Wei Chen, Ray Hua Horng

A novel fabrication process, which uses wafer transfer and micro-electroplating technique, has been proposed and tested. In this paper, the effects of the diaphragm thickness and stress, the air-gap thickness, and the area ratio of acoustic holes to backplate on the sensitivity of the condenser microphone have been demonstrated since the performance of the m

C. Serre, A. Pérez-Rodrigueza, N. Fondevilla, E. Martincic

The need for wearable or abandoned microsystems, as well as the trend to a lower power consumption of electronic devices, make miniaturized renewable energy generators a viable alternative to batteries. Among the different alternatives, an interesting option is the use of inertial microgenerators for energy scavenging from vibrations present in the environme

M. Worgull, M. Heckele, T. Mappes, B. Matthis

Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patterning with a LIGA-mold i

H. Rabani, F. Taddei, O. Bourgeois, R. Fazio

We study the influence of superconducting correlations on the electronic specific heat in a diffusive superconductor-normal metal-superconductor Josephson junction. We present a description of this system in the framework of the diffusive-limit Green&#39;s function theory, taking into account finite temperatures, phase difference as well as junction paramete

Herman L. Marshall, Claude R. Canizares, Norbert S. Schulz, Sebastian Heinz

We fit Chandra HETGS data obtained for the unusual X-ray binary SS 433. While line strengths and continuum levels hardly change, the jet Doppler shifts show aperiodic variations that probably result from shocks in interactions with the local environment. The X-ray and optical emission line regions are found to be related but not coincident as the optical lin

Michael Hilker, Christoph Schommer

Current network security systems are a collection of various security components, which are directly installed in the operating system. These check the whole node for suspicious behaviour. Armouring intrusions e.g. have the ability to hide themselves from being checked. We present in this paper an alternative organisation of security systems. The node is com

Michael Hilker, Christoph Schommer

Current network protection systems use a collection of intelligent components - e.g. classifiers or rule-based firewall systems to detect intrusions and anomalies and to secure a network against viruses, worms, or trojans. However, these network systems rely on individuality and support an architecture with less collaborative work of the protection component

Samuel Mimram

Game semantics aim at describing the interactive behaviour of proofs by interpreting formulas as games on which proofs induce strategies. In this article, we introduce a game semantics for a fragment of first order propositional logic. One of the main difficulties that has to be faced when constructing such semantics is to make them precise by characterizing

Andrey Todorov

In this paper we construct the analogue of Dedekind eta-function on the moduli space of polarized CY manifolds. We prove that the L-two norm of eta is the regularized determinants of the Laplacians of the CY metric on (0,1) forms. We construct the analogue of the Baily-Borel Compactification of the moduli space of polarized CY and prove that it has the same

E. B. Sonin

The current and the shot noise in a graphene sheet were analyzed in the ballistic regime for arbitrary voltage drops between leads and the sheet in the limit of infinite aspect ratio of the sheet width to its length, when quantization of transversal wave vectors is not essential. The cases of coherent and incoherent ballistic transport were compared. At high