Statistical Disorder in MBE-Grown AlGaAs/GaAs Superlattices for Quantum Bragg Mirrors using Synchrotron X-ray Diffraction

Abstract

AlGaAs/GaAs superlattices grown by Molecular Beam Epitaxy (MBE) are foundational for advanced optoelectronic devices, including Quantum Bragg Mirror (QBM) infrared detectors. The performance of these devices critically depends on achieving near-perfect periodicity and abrupt interfaces, however, intrinsic statistical fluctuations during MBE growth introduce nanoscale structural disorder that can degrade device efficiency. In this study, we present a comprehensive methodology for quantifying this disorder in a 203-layer QBM device. High-resolution structural characterization was performed using high-energy (25 keV) synchrotron X-ray diffraction. By coupling a recursive dynamical diffraction formalism with an ensemble simulated annealing refinement, we extracted statistically robust, layer-by-layer thickness profiles. Our analysis reveals highly systematic, material-specific deviations from the nominal design: all AlGaAs barrier layers were consistently thinner than nominal by 0.3-0.6 nm. Furthermore, the sequential thickness profile successfully identified a significant 35 nm deficit in the final macroscopic top contact layer and a 40 nm deficit in the first GaAs layer. Achieving a statistical precision of about 0.2 to 0.6 nm (approximately 1-2 atomic monolayers), this non-destructive diagnostic approach provides directly actionable feedback for MBE flux calibration protocols.