Mechanical Mixing in Nonlinear Nanomechanical Resonators

Abstract

Nanomechanical resonators, machined out of Silicon-on-Insulator wafers, are operated in the nonlinear regime to investigate higher-order mechanical mixing at radio frequencies, relevant to signal processing and nonlinear dynamics on nanometer scales. Driven by two neighboring frequencies the resonators generate rich power spectra exhibiting a multitude of satellite peaks. This nonlinear response is studied and compared to $n^{th}$-order perturbation theory and nonperturbative numerical calculations.